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*1999
2EEMichael Armacost, Peter D. Hoh, Richard Wise, Wendy Yan, Jeffrey J. Brown, John H. Keller, George A. Kaplita, Scott D. Halle, K. Paul Muller, Munir D. Naeem, Senthil Srinivasan, Hung Y. Ng, Martin Gutsche, Alois Gutmann, Bruno Spuler: Plasma-etching processes for ULSI semiconductor circuits. IBM Journal of Research and Development 43(1): 39-72 (1999)
1EEDavid E. Kotecki, John D. Baniecki, Hua Shen, Robert B. Laibowitz, Katherine L. Saenger, Jingyu Jenny Lian, Thomas M. Shaw, Satish D. Athavale, Cyril Cabral Jr., Peter R. Duncombe, Martin Gutsche, Gerhard Kunkel, Young-Jin Park, Yun-Yu Wang, Richard Wise: (Ba, Sr)TiO3 dielectrics for future stacked- capacitor DRAM. IBM Journal of Research and Development 43(3): 367-382 (1999)

Coauthor Index

1Michael Armacost [2]
2Satish D. Athavale [1]
3John D. Baniecki [1]
4Jeffrey J. Brown [2]
5Cyril Cabral Jr. [1]
6Peter R. Duncombe [1]
7Alois Gutmann [2]
8Scott D. Halle [2]
9Peter D. Hoh [2]
10George A. Kaplita [2]
11John H. Keller [2]
12David E. Kotecki [1]
13Gerhard Kunkel [1]
14Robert B. Laibowitz [1]
15Jingyu Jenny Lian [1]
16K. Paul Muller [2]
17Munir D. Naeem [2]
18Hung Y. Ng [2]
19Young-Jin Park [1]
20Katherine L. Saenger [1]
21Thomas M. Shaw [1]
22Hua Shen [1]
23Bruno Spuler [2]
24Senthil Srinivasan [2]
25Yun-Yu Wang [1]
26Richard Wise [1] [2]
27Wendy Yan [2]

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