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Giorgio Bacelli Vis

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*2007
1 Giorgio Bacelli, John V. Ringwood, Petar Iordanov: Impedance matching controller for an inductively coupled plasma chamber - L-type matching network automatic controller. ICINCO-SPSMC 2007: 202-207

Coauthor Index

1Petar Iordanov [1]
2John V. Ringwood [1]

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